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TOKUDA TPG-1RM Shibaura Pirani Gauge – Vacuum Measurement Specialist

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The TOKUDA TPG-1RM Shibaura Pirani Gauge is a high-precision vacuum measurement module designed for applications requiring accurate vacuum levels, from semiconductor manufacturing to vacuum pump diagnostics.

Measurement Range:1×10^-4 to 1 Torr

Accuracy:+/- 2% of Reading

Response Time:0.5 seconds

Operating Temperature:-10°C to +50°C

Pressure Sensitivity:1 x 10^-7 mbar

Display Type:LCD with Backlight

Power Supply:DC 12V ± 10%

Dimensions:100mm x 65mm x 30mm

    The TOKUDA TPG-1RM Shibaura Pirani Gauge offers unparalleled accuracy and reliability in measuring vacuum levels within a wide range of industrial settings. Its robust design ensures longevity and efficiency in even the most demanding environments.

    With its advanced Pirani sensor technology, this gauge provides precise vacuum readings down to 0.01 Torr, making it indispensable for semiconductor fabrication processes where ultra-high vacuum conditions are essential.

    Equipped with an RS-232/485 interface, the gauge seamlessly integrates into existing control systems, allowing for easy data transfer and monitoring from remote locations.

    Crafted from high-quality stainless steel, the gauge is not only durable but also resistant to corrosion, ensuring it can withstand exposure to aggressive gases commonly found in industrial applications.

    Offering a fast response time of less than one minute, the TPG-1RM guarantees quick and accurate vacuum measurements, enhancing operational efficiency and reducing downtime in critical processes.

TOKUDA TPG-1RM Shibaura Pirani Gauge




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