Measurement Range:0 to 100 Pa
Accuracy:±0.1% F.S.
Operating Temperature:-20°C to +60°C
Response Time:Less than 5 seconds
Power Supply:12V DC
Connection Type:RS485 interface
The ULVAC BPR2 G-TRAN Pirani Gauge Box Unit is engineered to meet the stringent demands of semiconductor and high-tech manufacturing environments. Its compact design integrates seamlessly into complex systems without compromising on performance.
Featuring state-of-the-art Pirani gauge technology, this unit ensures accurate and consistent vacuum pressure measurements, crucial for optimizing processes in thin film deposition, etching, and other critical steps in semiconductor fabrication.
Designed with user-friendliness in mind, the BPR2 G-TRAN Pirani Gauge Box Unit offers intuitive operation through its RS485 interface, allowing for easy integration with existing automation systems. Its rugged construction withstands harsh industrial conditions, ensuring long-lasting reliability.
Compliance with international safety standards, the ULVAC BPR2 G-TRAN Pirani Gauge Box Unit is suitable for use in a wide range of industries, from semiconductor production to research and development laboratories. Its high precision and durability make it an indispensable tool for achieving optimal process control and yield enhancement.
Backed by ULVAC’s commitment to innovation and customer service, this gauge box unit comes with comprehensive support and a warranty, ensuring peace of mind for users. Whether you’re upgrading existing equipment or planning a new installation, the ULVAC BPR2 G-TRAN Pirani Gauge Box Unit delivers the precision and reliability you need for successful vacuum process control.
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